The Science and Engineering of Microelectronic Fabrication

The Science and Engineering of Microelectronic Fabrication
Author :
Publisher : Oxford University Press, USA
Total Pages : 572
Release :
ISBN-13 : UOM:39015037450577
ISBN-10 :
Rating : 4/5 ( Downloads)

Book Synopsis The Science and Engineering of Microelectronic Fabrication by : Stephen A. Campbell

Download or read book The Science and Engineering of Microelectronic Fabrication written by Stephen A. Campbell and published by Oxford University Press, USA. This book was released on 1996 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be used as a textbook for both first year graduate and upper level undergraduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, nonoptical lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The book also makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest.


The Science and Engineering of Microelectronic Fabrication Related Books

The Science and Engineering of Microelectronic Fabrication
Language: en
Pages: 572
Authors: Stephen A. Campbell
Categories: Technology & Engineering
Type: BOOK - Published: 1996 - Publisher: Oxford University Press, USA

DOWNLOAD EBOOK

The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be use
Fabrication Engineering at the Micro and Nanoscale
Language: en
Pages: 0
Authors: Stephen A. Campbell
Categories: Technology & Engineering
Type: BOOK - Published: 2008-01-10 - Publisher: OUP USA

DOWNLOAD EBOOK

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering
Introduction to Microelectronic Fabrication
Language: en
Pages: 0
Authors: Richard C. Jaeger
Categories: Integrated circuit
Type: BOOK - Published: 2002 - Publisher: Pearson

DOWNLOAD EBOOK

For courses in Theory and Fabrication of Integrated Circuits. The author's goal in writing this text was to present a concise survey of the most up-to-date tech
Electron-Beam Technology in Microelectronic Fabrication
Language: en
Pages: 377
Authors: George Brewer
Categories: Technology & Engineering
Type: BOOK - Published: 2012-12-02 - Publisher: Elsevier

DOWNLOAD EBOOK

Electron-Beam Technology in Microelectronic Fabrication presents a unified description of the technology of high resolution lithography. This book is organized
Plasma Electronics
Language: en
Pages: 355
Authors: Toshiaki Makabe
Categories: Science
Type: BOOK - Published: 2006-03-27 - Publisher: CRC Press

DOWNLOAD EBOOK

Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities,