Plasma Electronics
| Author | : Toshiaki Makabe |
| Publisher | : CRC Press |
| Total Pages | : 355 |
| Release | : 2006-03-27 |
| ISBN-13 | : 9781420012279 |
| ISBN-10 | : 1420012274 |
| Rating | : 4/5 (74 Downloads) |
Book Synopsis Plasma Electronics by : Toshiaki Makabe
Download or read book Plasma Electronics written by Toshiaki Makabe and published by CRC Press. This book was released on 2006-03-27 with total page 355 pages. Available in PDF, EPUB and Kindle. Book excerpt: Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,
