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Low Dielectric Constant Materials for IC Applications
Language: en
Pages: 323

Low Dielectric Constant Materials for IC Applications

Authors: Paul S. Ho
Categories: Technology & Engineering
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

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Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-
Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set
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Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set

Authors: Hari Singh Nalwa
Categories: Science
Type: BOOK - Published: 1999-09-07 - Publisher: Elsevier

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Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They w
Low-dielectric Constant Materials-- Synthesis and Applications in Microelectronics
Language: en
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Low-dielectric Constant Materials-- Synthesis and Applications in Microelectronics

Authors: Toh-Ming Lu
Categories: Electric insulators and insulation
Type: BOOK - Published: 1995 - Publisher:

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Low Dielectric Constant Materials and Processes for Interlayer Dielectric Applications
Language: en
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Low Dielectric Constant Materials and Processes for Interlayer Dielectric Applications

Authors: Ramakrishna Vedula
Categories: Dielectric films
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High Dielectric Constant Materials
Language: en
Pages: 740

High Dielectric Constant Materials

Authors: Howard Huff
Categories: Science
Type: BOOK - Published: 2005 - Publisher: Springer Science & Business Media

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Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). Mor