ALD of Copper and Copper Oxide Thin Films for Applications in Metallization Systems of ULSI Devices
| Author | : |
| Publisher | : |
| Total Pages | : |
| Release | : 2008 |
| ISBN-13 | : OCLC:315977854 |
| ISBN-10 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis ALD of Copper and Copper Oxide Thin Films for Applications in Metallization Systems of ULSI Devices by :
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