Thin Films of Copper Oxide and Copper Grown by Atomic Layer Deposition for Applications in Metallization Systems of Microelectronic Devices
| Author | : Thomas Wächtler |
| Publisher | : Thomas Waechtler |
| Total Pages | : 247 |
| Release | : 2010 |
| ISBN-13 | : 9783941003170 |
| ISBN-10 | : 3941003178 |
| Rating | : 4/5 (78 Downloads) |
Book Synopsis Thin Films of Copper Oxide and Copper Grown by Atomic Layer Deposition for Applications in Metallization Systems of Microelectronic Devices by : Thomas Wächtler
Download or read book Thin Films of Copper Oxide and Copper Grown by Atomic Layer Deposition for Applications in Metallization Systems of Microelectronic Devices written by Thomas Wächtler and published by Thomas Waechtler. This book was released on 2010 with total page 247 pages. Available in PDF, EPUB and Kindle. Book excerpt:
