This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will

This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will

In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical backgroun

Research into and development of high-precision systems, microelectromechanical systems, distributed sensors/actuators, smart structural systems, high-precision