Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
| Author | : P. Rai-Choudhury |
| Publisher | : IET |
| Total Pages | : 784 |
| Release | : 1997 |
| ISBN-13 | : 0852969066 |
| ISBN-10 | : 9780852969069 |
| Rating | : 4/5 (69 Downloads) |
Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography by : P. Rai-Choudhury
Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography written by P. Rai-Choudhury and published by IET. This book was released on 1997 with total page 784 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
