Ultrasonic nano/microfabrication, handling and driving is an emerging actuation technology, which utilizes ultrasonic vibration and the physical effects of ultr

Ultrasonic nano/microfabrication, handling and driving is an emerging actuation technology, which utilizes ultrasonic vibration and the physical effects of ultr

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised