Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication
| Author | : P. Rai-Choudhury |
| Publisher | : SPIE Press |
| Total Pages | : 706 |
| Release | : 1997 |
| ISBN-13 | : 0819423793 |
| ISBN-10 | : 9780819423795 |
| Rating | : 4/5 (95 Downloads) |
Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication by : P. Rai-Choudhury
Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication written by P. Rai-Choudhury and published by SPIE Press. This book was released on 1997 with total page 706 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
